Research Article

Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation

Figure 8

Result window of ENCOTION. The simulated transport mechanisms are organized in nine sortable columns, containing the extracted and analyzed ions, the effective energies of the contaminating element with and without postacceleration, the simulated apparent mass, and the mass difference to the apparent mass of the implanted ion. In this example, the simulated transport mechanisms of Al during 11B+ implantation are listed, sorted by effective energy in ascending order.
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