Mn-Rich Nanostructures in Ge_1−𝑥Mn_𝑥: Fabrication, Microstructure, and Magnetic Properties

Figure 3

Bright-field cross-sectional TEM images of the GeMn samples implanted at various temperatures (same Mn dose of 2×10¹⁶ at./cm²). Insets in (a): electron diffraction patterns taken in the zones marked by the arrows. Inset in (b): high resolution close-up of an amorphous nanocluster and electron diffraction pattern taken in the same zone. Inset in (c): high resolution close-up of a crystalline nanocluster. Reproduced from [10]. Copyright ©2007, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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