Nonstoichiometry in Studied by Ion Beam Methods and Photoelectron Spectroscopy
The NRA spectra of (a) Ta2O5 reference sample; (b) thin film deposited on thermally oxidized Si wafer (Si/SiO2) and (c) on carbon foil C. The nuclear reactions corresponding to three peaks in the spectra are indicated.
(a) Ta2O5 reference
(b) on Si/SiO2
(c) on C
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