Advances in Materials Science and Engineering / 2012 / Article / Fig 7

Review Article

Nonstoichiometry in Studied by Ion Beam Methods and Photoelectron Spectroscopy

Figure 7

Fit of Ti XPS spectrum for thin films of obtained at (a)  nm/s and (b)  nm/s. Three components of each fit 1, 2, 3 correspond to different oxidation states of titanium.

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