Characteristics and Photocatalytic Properties of <svg style="vertical-align:-4.50008pt;width:44.5px;" id="M1" height="21.0375" version="1.1" viewBox="0 0 44.5 21.0375" width="44.5"  xmlns="http://www.w3.org/2000/svg">
	<g transform="matrix(1.25,0,0,-1.25,0,21.0375)">
		<g transform="translate(72,-55.17)">
			<text transform="matrix(1,0,0,-1,-71.95,59.7)">
				<tspan style="font-size: 17.93px; " x="0" y="0">T</tspan>
				<tspan style="font-size: 17.93px; " x="10.795666" y="0">i</tspan>
				<tspan style="font-size: 17.93px; " x="15.78104" y="0">O</tspan>
			</text>

			<text transform="matrix(1,0,0,-1,-43.22,55.22)">
				<tspan style="font-size: 12.55px; " x="0" y="0">2</tspan>
			</text>

		</g>
	</g>
</svg> Thin Film Prepared by Sputter Deposition and Post-N<sup  >+</sup> Ion Implantation

<table>XPS Ti2p and N1s spectra of unirradiated TiO<sub>2</sub> thin film and the irradiated A-, R-, and M-TiO<sub>2</sub> thin film with an <svg height="14.2625" id="M39" style="vertical-align:-0.12283pt" version="1.1" viewbox="0 0 20.362499 14.2625" width="20.362499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,0,0,-.017,.062,14.05)"><path d="M719 650v-28q-43 -2 -62 -15t-22 -44q-6 -47 -6 -169v-403h-31l-426 524h-2v-251q0 -111 6 -169q4 -37 24 -50.5t72 -16.5v-28h-237v28q45 2 64.5 16t23.5 49q6 62 6 171v220q0 54 -3 68.5t-17 32.5q-16 19 -34.5 26.5t-54.5 10.5v28h147l418 -502h3v246q0 117 -7 166
q-4 34 -24.5 47t-73.5 15v28h236z" id="x4E"></path></g>
<g transform="matrix(.012,0,0,-.012,12.688,5.888)"><path d="M535 230h-212v-233h-58v233h-213v50h213v210h58v-210h212v-50z" id="x2B"></path></g>
</svg> ion dose of 5.0 × 10<sup>15</sup> ions/cm<sup>2</sup>.</table>

Advances in Materials Science and Engineering

fig4

Figure 4

Figure 4: Characteristics and Photocatalytic Properties of <svg style="vertical-align:-4.50008pt;width:44.5px;" id="M1" height="21.0375" version="1.1" viewBox="0 0 44.5 21.0375" width="44.5"  xmlns="http://www.w3.org/2000/svg">
	<g transform="matrix(1.25,0,0,-1.25,0,21.0375)">
		<g transform="translate(72,-55.17)">
			<text transform="matrix(1,0,0,-1,-71.95,59.7)">
				<tspan style="font-size: 17.93px; " x="0" y="0">T</tspan>
				<tspan style="font-size: 17.93px; " x="10.795666" y="0">i</tspan>
				<tspan style="font-size: 17.93px; " x="15.78104" y="0">O</tspan>
			</text>

			<text transform="matrix(1,0,0,-1,-43.22,55.22)">
				<tspan style="font-size: 12.55px; " x="0" y="0">2</tspan>
			</text>

		</g>
	</g>
</svg> Thin Film Prepared by Sputter Deposition and Post-N<sup  >+</sup> Ion Implantation 

Figure 4 | Characteristics and Photocatalytic Properties of 
	
		
			
				T
				i
				O
			

			
				2
			

		
	
 Thin Film Prepared by Sputter Deposition and Post-N+ Ion Implantation 

Advances in Materials Science and Engineering

Characteristics and Photocatalytic Properties of T i O 2 Thin Film Prepared by Sputter Deposition and Post-N+ Ion Implantation

Figure 4

Characteristics and Photocatalytic Properties of Thin Film Prepared by Sputter Deposition and Post-N⁺ Ion Implantation