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Advances in Materials Science and Engineering
Volume 2013 (2013), Article ID 401392, 6 pages
Research Article

Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering

1Department of Electronic Engineering, Hsiuping University of Science and Technology, Taichung 412-80, Taiwan
2Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402-27, Taiwan
3Graduate Institute of Optoelectronic Engineering and Department of Electrical Engineering, National Chung Hsing University, No. 250, Kuo Kuang Road, Taichung 402-27, Taiwan

Received 15 September 2013; Accepted 2 November 2013

Academic Editor: Shoou-Jinn Chang

Copyright © 2013 Neng-Fu Shih et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


DC power and RF power were introduced into the magnetic controlled sputtering system simultaneously to deposit AZO films in order to get an acceptable deposition rate with high quality transparency conducting thin film. The resistivity decreases with the RF power for the as-deposited samples. The resistivity of 6 × 10−4 Ω-cm and 3.5–4.5 × 10−4 Ω-cm is obtained for the as-deposited sample, and for all annealed samples, respectively. The transmittance of the AZO films with higher substrate temperature is generally above 80% for the incident light wavelength within 400–800 nm. The transmittance of the as-deposited samples reveals a clear blue shift phenomenon. The AZO films present (002) oriented preference as can be seen from the X-ray diffraction curves. All AZO films reveal compressive stress. The annealing process improves the electrical property of AZO films. A significant blue shift phenomenon has been found, which may have a great application for electrode in solar cell.