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Advances in Materials Science and Engineering
Volume 2013 (2013), Article ID 401392, 6 pages
http://dx.doi.org/10.1155/2013/401392
Research Article

Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering

1Department of Electronic Engineering, Hsiuping University of Science and Technology, Taichung 412-80, Taiwan
2Graduate Institute of Optoelectronic Engineering, National Chung Hsing University, Taichung 402-27, Taiwan
3Graduate Institute of Optoelectronic Engineering and Department of Electrical Engineering, National Chung Hsing University, No. 250, Kuo Kuang Road, Taichung 402-27, Taiwan

Received 15 September 2013; Accepted 2 November 2013

Academic Editor: Shoou-Jinn Chang

Copyright © 2013 Neng-Fu Shih et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Neng-Fu Shih, Jin-Zhou Chen, and Yeu-Long Jiang, “Properties and Analysis of Transparency Conducting AZO Films by Using DC Power and RF Power Simultaneous Magnetron Sputtering,” Advances in Materials Science and Engineering, vol. 2013, Article ID 401392, 6 pages, 2013. doi:10.1155/2013/401392