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Advances in Materials Science and Engineering
Volume 2013, Article ID 545076, 7 pages
Research Article

Optical and Structural Properties of Titanium Dioxide Films from and Starting Materials Annealed at Various Temperatures

Department of Electrical Engineering, National University of Tainan, No. 33, Section 2, Shu-Lin Street, Tainan 70005, Taiwan

Received 29 August 2013; Accepted 8 October 2013

Academic Editor: Shoou-Jinn Chang

Copyright © 2013 Shih-Chang Shei. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


We investigated the optical and structural properties of titanium dioxide films deposited from and starting materials by electron beam evaporation at annealing temperatures from to . We find that the refractive index of as-deposited films from starting material is higher than that of as-deposited films from starting material. In addition, during thermal annealing, the refractive index fluctuates slightly as compared with films from starting material. This should be attributed to the fact that the deposited molecules had a higher packing density, such that the film was denser. The transmittance spectra of films from starting material indicate that transmittance edge slightly shifts to longer wavelength with the annealing temperature increasing when compared with starting material, in which the transmittance spectra indicate that the transmittance edge strongly shifts to longer wavelength with the same annealing temperature increasing. These findings should be attributed to the absence of oxygen and scattering of rough surface.