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Advances in Materials Science and Engineering
Volume 2013 (2013), Article ID 640428, 7 pages
Research Article

A Humidity Sensor Based on Silver Nanoparticles Thin Film Prepared by Electrostatic Spray Deposition Process

1Electronics and Control System for Nanodevice Research Laboratory, College of Nanotechnology, King Mongkut’s Institute of Technology Ladkrabang, Bangkok 10520, Thailand
2Thailand Center of Excellence in Physics, CHE, 328 Si Ayutthaya Road, Bangkok 10400, Thailand
3Nanotec-KMITL Excellence Center on Nanoelectronic Devices, Bangkok 10520, Thailand

Received 27 March 2013; Revised 10 May 2013; Accepted 19 May 2013

Academic Editor: Zhimin Liu

Copyright © 2013 Thutiyaporn Thiwawong et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


In this work, thin film of silver nanoparticles for humidity sensor application was deposited by electrostatic spray deposition technique. The influence of the deposition times on properties of films was studied. The crystal structures of sample films, their surface morphology, and optical properties have been investigated by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and UV-VIS spectrophotometer, respectively. The crystalline structure of silver nanoparticles thin film was found in the orientation of (100) and (200) planes of cubic structure at diffraction angles 2θ  =  38.2° and 44.3°, respectively. Moreover, the silver nanoparticles thin films humidity sensor was fabricated onto the interdigitated electrodes. The sensor exhibited the humidity adsorption and desorption properties. The sensing mechanisms of the device were also elucidated by complex impedance analysis.