Improving Barrier Properties of PET by Depositing a Layer of DLC Films on Surface

Table 3

Barrier properties under different deposition process.

Sample	Ar : C2H2	RF power (W)	Time (s)	Gas flow rate; (sccm)	Oxygen permeability; (cm^3/m^2 · 24h · 0.1 MPa)	Water vapor permeability; (g/m^2 · 24 h)
1	1 : 1	600	30	30	22.41	11.56
2	1 : 2	600	30	30	12.16	4.01
3	2 : 1	600	30	30	32.78	13.73
4	3 : 1	600	30	30	46.91	21.25
5	1 : 2	600	10	30	43.91	16.07
6	1 : 2	600	20	30	27.89	11.03
7	1 : 2	600	60	30	19.01	8.15
8	1 : 2	300	30	30	24.37	9.16
9	1 : 2	900	30	30	18.76	7.69
10	1 : 2	1200	30	30	26.12	14.57
11*	—	—	—	—	135.98	48.76

∗Blank sample.