Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Figure 8
(a) curves of an Ti nanosensor at room temperature in 50% relative humidity (continuous line) and dry (open circles multiplied by 10) atmospheres. (b) The Arrhenius plot of Ti nanosenor in warming up (open circles) and cooling down (continuous line).