Design and Fabrication of the Large Thrust Force Piezoelectric Actuator

Table 2

The quality characteristic response table in 𝑋-direction (unit: m).

	𝐴	𝐵	𝐶	𝐷
Level 1	3.99𝐸−8	2.88𝐸−8	6.97𝐸−8	4.54𝐸−8
Level 2	7.10𝐸−8	8.83𝐸−8	5.89𝐸−8	5.53𝐸−8
Level 3		4.92𝐸−8	3.78𝐸−8	6.56𝐸−8
Range	3.11𝐸−8	5.95𝐸−8	3.19𝐸−8	2.02𝐸−8
Rank	3	1	2	4