New Measurement Method and Uncertainty Estimation for Plate Dimensions and Surface Quality

Table 11

Estimation of uncertainty budget in straightness deviation for tiles measurement.

Test specimen	Sources of uncertainty	St. uncertainty, 𝑈(𝑋𝑖)			Assumed distribution	Combined uncertainty, 𝑢(𝑋𝑖)			𝐶
		Δ𝐶, µm	Δ𝑆, µm	Δ𝑊, µm		Δ𝐶, µm	Δ𝑆, µm	Δ𝑊, µm
First	Repeatability	0.10	0.20	0.20	Normal	0.05	0.10	0.10	1
	Resolution	0.05			Rectangular	0.029			1
	MPE	0.9 + (𝐿/350)			Normal (based on 𝑘=3)	0.30			1
	MPE𝑃	0.5			Rectangular	0.29			1
	Combined standards uncertainty, 𝑢𝑐=±0.43 µm
	Expanded uncertainty 𝑈exp=±0.86 µm
Second	Repeatability	0.20	0.10	0.05	Normal	0.10	0.05	0.03	1
	Resolution	0.05			Rectangular	0.029			1
	MPE	0.9 + (𝐿/350)			Normal (based on 𝑘=3)	0.30			1
	MPE𝑃	0.5			Rectangular	0.29			1
	Combined standards uncertainty, 𝑢𝑐=±0.43 µm
	Expanded uncertainty 𝑈exp=±0.86 µm
Third	Repeatability	0.30	0.40	0.10	Normal	0.15	0.20	0.05	1
	Resolution	0.05			Rectangular	0.029			1
	MPE	0.9 + (𝐿/350)			Normal (based on 𝑘=3)	0.30			1
	MPE𝑃	0.5			Rectangular	0.29			1
	Combined standards uncertainty, 𝑢𝑐=±0.46 µm
	Expanded uncertainty 𝑈exp=±0.92 µm