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Advances in Materials Science and Engineering
Volume 2013, Article ID 950791, 6 pages
http://dx.doi.org/10.1155/2013/950791
Research Article

Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave

1Graduate School of Mechanical Engineering, Hanyang University, Seoul 133-791, Republic of Korea
2School of Mechanical Engineering, Hanyang University, Seoul 133-791, Republic of Korea

Received 19 July 2013; Revised 16 November 2013; Accepted 18 November 2013

Academic Editor: Yan Yang

Copyright © 2013 Min-Kyoo Song and Kyung-Young Jhang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Min-Kyoo Song and Kyung-Young Jhang, “Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave,” Advances in Materials Science and Engineering, vol. 2013, Article ID 950791, 6 pages, 2013. https://doi.org/10.1155/2013/950791.