Effects of the Boron-Doped p⁺ Emitter on the Efficiency of the n-Type Silicon Solar Cell

Table 1

Contact resistance at each doping concentration of boron.

Doping concentration (atoms/cm^3)	Contact resistance (Ωcm^2)
1 × 10^17	0.5
5 × 10^17	0.2
1 × 10^18	0.1
5 × 10^18	0.07
1 × 10^19	0.05
5 × 10^19	0.01
1 × 10^20	0.005
5 × 10^20	0.001
1 × 10^21	0.0005
5 × 10^21	0.0001
1 × 10^22	0.00001
2 × 10^22	0