Optimization of the Cathode Arc Plasma Deposition Processing Parameters of ZnO Film Using the Grey-Relational Taguchi Method

Table 2

Grain size of ZnO thin films for the L9 orthogonal array from experiments 1~9.

Experiment number	Control factors			Grain size (nm)
	A	B	C
1	1	1	1	19.17
2	2	2	2	21.08
3	3	3	3	21.08
4	1	2	3	21.62
5	2	3	1	19.61
6	3	1	2	18.74
7	1	3	2	19.16
8	2	1	3	20.57
9	3	2	1	21.62