Growth and Device Performance of AlGaN/GaN Heterostructure with AlSiC Precoverage on Silicon Substrate
Figure 2
(a) SIMS profile of film grown on Si substrate with AlSiC precoverage layer in real epitaxial layer. (b) XPS measurement of 20 nm thick reference AlSiC film. (c) AFM images of Si surface covered with Al precoverage layer. (d) AFM images of Si surface covered with AlSiC precoverage layer.
