Growth and Device Performance of AlGaN/GaN Heterostructure with AlSiC Precoverage on Silicon Substrate
Figure 4
(a) Raman scattering spectra of AlGaN/GaN layers grown on Si substrate with Al and AlSiC precoverage layer. The inset shows the map image of wavelength for grown films with AlSiC precoverage layer. (b) Vertical leakage current of AlGaN/GaN layers grown on Si substrate with Al and AlSiC precoverage layer.
