Bipolar Switching Characteristics of RRAM Cells with CaBi₄Ti₄O₁₅ Film

Figure 2

Surface morphologies of the CBTi144 films with (a) no annealing, (b) 450°C RTA, (c) 500°C RTA, and (d) 550°C RTA.

(a)

(b)

(c)

(d)