Development of Pd Alloy Hydrogen Separation Membranes with Dense/Porous Hybrid Structure for High Hydrogen Perm-Selectivity

Table 1

Comparison of hydrogen permeability between the present membrane and other types of literature.

Support	Method	Membrane		Temp. (K)	Permeability (mol m m^−2 s^−1 Pa^−0.5)	Selectivity; (H2/N2)	Ref.
Material		Material	Thick. (m)
Al2O3	ELP*	Pd	3.5	773		4300	[17]
PSS	ELP	Pd	7.5	873		685	[18]
PNS	Sputtering	PdCu	12	773		Infinity	[13]
PNS	Sputtering	PdCu	10	723		Infinity	This work (purely dense structure)
PNS	Sputtering	PdCu	10	723		Infinity	This work (dense/porous hybrid structure)

ELP: electroless plating.