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Advances in Materials Science and Engineering
Volume 2014, Article ID 639461, 8 pages
http://dx.doi.org/10.1155/2014/639461
Research Article

Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

1Wuhan Research Institute of Materials Protection, Wuhan 430030, China
2State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China

Received 1 May 2013; Accepted 24 October 2013; Published 28 January 2014

Academic Editor: Aiguo Xu

Copyright © 2014 Hongfei Shang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Hongfei Shang, Jian Li, and Tianmin Shao, “Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition,” Advances in Materials Science and Engineering, vol. 2014, Article ID 639461, 8 pages, 2014. https://doi.org/10.1155/2014/639461.