Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

<table>TGA curves of the TiN/Ta multilayer film and the TiN monolayer film.</table>

Advances in Materials Science and Engineering

Figure 10: Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition 