Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

<table>Cross-sectional bright field transmission electron micrograph and selected area electron diffraction pattern of the TiN/Ta multilayer film.</table>

Advances in Materials Science and Engineering

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Figure 2

Figure 2: Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition 