Advances in Materials Science and Engineering

Research Article

Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition

Figure 7

Optical images of the indentation (a) the TiN/Ta multilayer film and (b) the TiN monolayer film.
639461.fig.007a
(a)
639461.fig.007b
(b)