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Advances in Materials Science and Engineering
Volume 2014, Article ID 948708, 6 pages
Research Article

Improvement of Homogeneity and Aspect Ratio of Silicon Tips for Field Emission by Reactive-Ion Etching

Faculty of General Sciences and Microsystems Technology, OTH Regensburg, 93053 Regensburg, Bavaria, Germany

Received 16 February 2014; Accepted 9 March 2014; Published 6 April 2014

Academic Editor: Feng Zhao

Copyright © 2014 Robert Damian Lawrowski et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [4 citations]

The following is the list of published articles that have cited the current article.

  • Rajkumar Patra, S. Ghosh, E. Sheremet, Menaka Jha, R. D. Rodriguez, D. Lehmann, A. K. Ganguli, H. Schmidt, S. Schulze, M. Hietschold, D. R. T. Zahn, and O. G. Schmidt, “Enhanced field emission from lanthanum hexaboride coated multiwalled carbon nanotubes: Correlation with physical properties,” Journal of Applied Physics, vol. 116, no. 16, pp. 164309, 2014. View at Publisher · View at Google Scholar
  • Robert Lawrowski, Christoph Langer, Christian Prommesberger, Florian Dams, Michael Bachmann, and Rupert Schreiner, “Fabrication and simulation of silicon structures with high aspect ratio for field emission devices,” Technical Digest - 2014 27th International Vacuum Nanoelectronics Conference, IVNC 2014, pp. 193–194, 2014. View at Publisher · View at Google Scholar
  • Christian Prommesberger, Christoph Langer, Robert Ławrowski, and Rupert Schreiner, “Investigations on the long-term performance of gated p-type silicon tip arrays with reproducible and stable field emission behavior,” Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, vol. 35, no. 1, pp. 012201, 2017. View at Publisher · View at Google Scholar
  • S. L. Cheng, H. C. Lin, Y. H. Huang, and S. C. Yang, “Fabrication of periodic arrays of needle-like Si nanowires on (001)Si and their enhanced field emission characteristics,” RSC Adv., vol. 7, no. 39, pp. 23935–23941, 2017. View at Publisher · View at Google Scholar