Research Article
Diamond-Like Carbon Film Deposition Using DC Ion Source with Cold Hollow Cathode
Figure 3
Raman spectra of samples. (a) = 5 kV and different pressure p, mPa: 1: 42; 2: 30; 3: 20, and different substrate current I, mA: 1: 70; 2: 45; 3: 35; (b) p = 30 mPa, , kV: 1: 5; 2: 3; 3: 1.5.