The Microstructures and Electrical Resistivity of (Al, Cr, Ti)FeCoNiO_x High-Entropy Alloy Oxide Thin Films

Table 1

The chemical compositions of the (Al, Cr, Ti)FeCoNi targets.

Alloys	Compositions (at.%)
	Al	Ti	Cr	Fe	Co	Ni
FeCoNi	*	*	*	33.2	33.3	33.5
AlFeCoNi	24.8	*	*	25.2	25.1	24.9
TiFeCoNi	*	25.1	*	25.2	24.7	25.0
CrFeCoNi	*	*	25.1	24.8	25.3	24.8