Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS

<div>SEM image (×2200) and EDX analysis of the fixed base of DS switch. The elemental composition (wt.%) in point (1) on the contacting surface (marked in Figure <a href="../fig1/#b">1(b)</a> by #3) is Au 52.6, Rh 24.5, O 12.3, Al 8.4, and Cu 2.2, and in point (2) on the conducting path-Au 77.9, O 11.4, Al 8.4, and Cu 2.3.</div>

Advances in Materials Science and Engineering

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Figure 2

Figure 2: Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS 