Journals
Publish with us
Publishing partnerships
About us
Blog
Advances in Materials Science and Engineering
Journal overview
For authors
For reviewers
For editors
Table of Contents
Special Issues
Advances in Materials Science and Engineering
/
2015
/
Article
/
Fig 5
/
Research Article
Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
Figure 5
Enlarged SEM image (×10000) collected around the point #1 on the contacting surface of the fixed base of DS switch (see Figure
2
).