A Study of Thin Film Resistors Prepared Using Ni-Cr-Si-Al-Ta High Entropy Alloy

<div>Room temperature resistivity of Ni-Cr-Si-Al-Ta films with different sputtering powers and annealing temperatures.</div>

Advances in Materials Science and Engineering

Figure 6: A Study of Thin Film Resistors Prepared Using Ni-Cr-Si-Al-Ta High Entropy Alloy 