Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films

Table 2

Grain size (nm) for the Cu films with different thicknesses and annealing temperatures.

Annealing temperature (°C)	Thickness (μm)
	1.0	1.6	3.0
As-deposited	66	88	91
300	100	124	143
400	120	165	170
500	375	405	550