Study of Large-Scale Aluminium-Doped Zinc Oxide Ceramic Targets Prepared by Slip Casting

Table 2

Deposition parameters of the AZO films.

Working power (W)	100	150	200	250	300
Deposition rate (Å/sec)	0.047	0.191	0.27	0.62	0.97
Deposition time (min)	1064	262	185	80	51
Transmittance (%)	—	92.67	89.51	93.73	92.76
Sheet resistance (Ω/sq)	—	200.42	52.83	38.86	45.28