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Advances in Materials Science and Engineering
Volume 2017 (2017), Article ID 1759469, 7 pages
https://doi.org/10.1155/2017/1759469
Research Article

Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering

1Research and Educational Center for Physics of Solid State Nanostructures, Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950, Russia
2Research Institute for Physics and Technology, Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950, Russia
3Department of Physics, Lobachevsky State University of Nizhny Novgorod, 23 Gagarin Ave., Nizhny Novgorod 603950, Russia

Correspondence should be addressed to Dmitry Filatov; ur.xobni@votalif_yrtimd

Received 20 April 2017; Accepted 11 June 2017; Published 12 July 2017

Academic Editor: Ilia Ivanov

Copyright © 2017 Oleg Gorshkov et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Oleg Gorshkov, Ivan Antonov, Dmitry Filatov, et al., “Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering,” Advances in Materials Science and Engineering, vol. 2017, Article ID 1759469, 7 pages, 2017. doi:10.1155/2017/1759469