Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering

<div>High resolution X-TEM image of a ZrO2(Y)/Au(1 nm)/ZrO2(Y)/Si stack after annealing at 450°C for 2 min.</div>

Advances in Materials Science and Engineering

Figure 1: Fabrication of Metal Nanoparticle Arrays in the ZrO2(Y), HfO2(Y), and GeOx Films by Magnetron Sputtering