Influence of Elements on the Corrosion Resistance of DLC Films

<div class="floats-full-page floats-full-page-other"><h2>Table 2</h2><div class="floats-full-page-caption">G peak and <svg height="12.584pt" id="M6" style="vertical-align:-3.29567pt" version="1.1" viewbox="-0.0498162 -9.28833 29.3633 12.584" width="29.3633pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M405 650H141L135 622C222 616 230 610 215 535L133 116C118 41 113 33 29 28L23 0H289L295 28C209 33 205 40 219 116L298 535C312 609 317 616 399 622L405 650Z" id="g113-74"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="428" vert-adv-y="428" xpluscharwidth="5.564"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,4.719,3.132)"><path d="M43 650V617C122 612 130 606 130 522V128C130 44 122 37 34 32V0H275C400 0 497 25 573 82C652 142 698 229 698 350C698 445 662 518 613 565C549 625 456 650 327 650H43ZM217 544C217 580 220 591 229 599C240 607 264 613 311 613C380 613 437 599 482 570C561 523 598 436 598 336C598 177 511 40 324 40C248 40 217 61 217 135V544Z" id="g58-66"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="744" vert-adv-y="744" xpluscharwidth="11.48937768"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,12.013,0)"><path d="M368 703H309L44 -163H104L368 703Z" id="g113-48"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="412" vert-adv-y="412" xpluscharwidth="17.369"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,17.374,0)"><path d="M405 650H141L135 622C222 616 230 610 215 535L133 116C118 41 113 33 29 28L23 0H289L295 28C209 33 205 40 219 116L298 535C312 609 317 616 399 622L405 650Z" id="g113-74"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="428" vert-adv-y="428" xpluscharwidth="22.938"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,22.093,3.132)"><path d="M700 305H441V272C542 264 548 258 548 186V107C548 64 536 53 516 42C493 30 462 24 429 24C237 24 151 189 151 333C151 517 264 626 415 626C507 626 585 594 609 470L642 476C634 544 629 601 626 636C594 644 513 665 429 665C234 665 46 554 46 321C46 123 194 -15 415 -15C495 -15 578 7 642 22C635 50 635 81 635 116V201C635 259 639 264 700 272V305Z" id="g58-69"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="725" vert-adv-y="725" xpluscharwidth="28.690478249999998"></glyph.data></g></svg> intensity ratio for all films.</div><div class="floats-full-page-content"><table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr /></td></tr><tr class="thead"><td class="align_left">Film type</td><td class="align_center">Gaseous mixture</td><td class="align_center">Gas flow rate ratio</td><td class="align_center">G peak (cm<sup>−1</sup>)</td><td class="align_center"><span style="width: 29.1898ptpx;"><svg height="12.5977pt" id="M7" style="vertical-align:-3.30937pt" version="1.1" viewbox="-0.0498162 -9.28833 29.1898 12.5977" width="29.1898pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M405 650H141L135 622C222 616 230 610 215 535L133 116C118 41 113 33 29 28L23 0H289L295 28C209 33 205 40 219 116L298 535C312 609 317 616 399 622L405 650Z" id="g113-74"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="428" vert-adv-y="428" xpluscharwidth="5.564"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,4.719,3.132)"><path d="M43 650V622C120 616 128 612 128 526V124C128 39 120 33 34 27V0H270C392 0 492 25 567 83C643 141 690 230 690 350C690 444 655 517 605 565C543 625 450 650 323 650H43ZM213 547C213 587 217 598 226 604C236 612 262 617 304 617C371 617 429 604 474 576C554 529 592 439 592 336C592 176 505 36 319 36C246 36 213 55 213 131V547Z" id="g190-69"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="735" vert-adv-y="735" xpluscharwidth="11.40747795"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,11.931,0)"><path d="M368 703H309L44 -163H104L368 703Z" id="g113-48"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="412" vert-adv-y="412" xpluscharwidth="17.287"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,17.292,0)"><path d="M405 650H141L135 622C222 616 230 610 215 535L133 116C118 41 113 33 29 28L23 0H289L295 28C209 33 205 40 219 116L298 535C312 609 317 616 399 622L405 650Z" id="g113-74"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="428" vert-adv-y="428" xpluscharwidth="22.856"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,22.011,3.132)"><path d="M692 302H438V274C537 267 543 260 543 188V103C543 61 531 48 511 37C489 26 458 20 424 20C231 20 146 188 146 333C146 517 258 630 411 630C507 630 582 597 606 474L634 480C627 546 622 601 619 636C586 643 510 665 426 665C230 665 44 552 44 321C44 122 191 -15 411 -15C491 -15 573 7 635 21C629 49 628 81 628 116V202C628 261 632 266 692 274V302Z" id="g190-72"></path><glyph.data ascent="989" descent="-360" horiz-adv-x="715" vert-adv-y="715" xpluscharwidth="28.51747855"></glyph.data></g></svg></span></td></tr><tr><td class="thead-hr" colspan="5"><hr /></td></tr><tr><td class="align_left">Pure DLC</td><td class="align_center">C<sub>2</sub>H<sub>2</sub></td><td class="align_center">—</td><td class="align_center">1,534</td><td class="align_center">0.61</td></tr><tr><td class="align_left" colspan="5"><hr /></td></tr><tr><td class="align_left" rowspan="2">Si-DLC</td><td class="align_center" rowspan="2">C<sub>2</sub>H<sub>2</sub> : TMS</td><td class="align_center">2 : 1</td><td class="align_center">1,479</td><td class="align_center">0.35</td></tr><tr><td class="align_center">1 : 4</td><td class="align_center">1,457</td><td class="align_center">0.17</td></tr><tr><td class="align_left" colspan="5"><hr /></td></tr><tr><td class="align_left" rowspan="3">Si-N-DLC</td><td class="align_center" rowspan="3">C<sub>2</sub>H<sub>2</sub> : TMS : N<sub>2</sub></td><td class="align_center">14 : 1 : 1</td><td class="align_center">1,513</td><td class="align_center">0.53</td></tr><tr><td class="align_center">14 : 1 : 2</td><td class="align_center">1,517</td><td class="align_center">0.57</td></tr><tr><td class="align_center">14 : 1 : 3</td><td class="align_center">1,520</td><td class="align_center">0.58</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr" /></td></tr></table></td></tr></table></div></div>

Table 2 | Influence of Elements on the Corrosion Resistance of DLC Films

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Table 2: Influence of Elements on the Corrosion Resistance of DLC Films

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Table 2

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