Advances in Materials Science and Engineering / 2017 / Article / Tab 2

Research Article

Influence of Elements on the Corrosion Resistance of DLC Films

Table 2

G peak and intensity ratio for all films.

Film typeGaseous mixtureGas flow rate ratioG peak (cm−1)

Pure DLCC2H21,5340.61

Si-DLCC2H2 : TMS2 : 11,4790.35
1 : 41,4570.17

Si-N-DLCC2H2 : TMS : N214 : 1 : 11,5130.53
14 : 1 : 21,5170.57
14 : 1 : 31,5200.58

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