Influence of Elements on the Corrosion Resistance of DLC Films

Table 2

G peak and intensity ratio for all films.

Film type	Gaseous mixture	Gas flow rate ratio	G peak (cm^−1)
Pure DLC	C2H2	—	1,534	0.61
Si-DLC	C2H2 : TMS	2 : 1	1,479	0.35
		1 : 4	1,457	0.17
Si-N-DLC	C2H2 : TMS : N2	14 : 1 : 1	1,513	0.53
		14 : 1 : 2	1,517	0.57
		14 : 1 : 3	1,520	0.58