Advances in Materials Science and Engineering / 2017 / Article / Tab 3

Research Article

Influence of Elements on the Corrosion Resistance of DLC Films

Table 3

Relative atomic content and mechanical properties of all films.

Film typeGaseous mixtureGas flow rate ratio Relative atomic content (at.%)Estimated content (at.%)Mechanical properties
CSiONSiHardness (GPa)Elastic modulus (GPa)

Pure DLCC2H284.016.015.9142.3

Si-DLCC2H2 : TMS2 :
1 : 457.540.02.52414.4133.5

Si-N-DLCC2H2 : TMS : N214 : 1 : 179.319.30.401.03.313.7129.3
14 : 1 :
14 : 1 : 376.920.20.902.04.213.0124.4

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