Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Figure 12

Mean indention hardness and elastic modulus with standard variance in GPa (a), calculated resistance against elastic deformation (elastic strain to failure) (b), and plastic deformation (c) of AlTiN coatings deposited by HPPMS with various pulse-frequency in the range of 100–500 Hz at cathode mean power of 4 kW, pressure of 0.6 Pa, and deposition temperature of 500°C.

(a)

(b)

(c)