Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

<div>Surface roughness <svg height="11.9316pt" id="M43" style="vertical-align:-3.2957pt" version="1.1" viewbox="-0.0498162 -8.6359 19.6841 11.9316" width="19.6841pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M610 18C585 26 567 34 540 68C517 97 499 128 476 171C452 215 425 276 413 304C496 332 570 394 570 494C570 555 545 595 509 619S419 650 364 650H139L133 622C216 615 219 612 203 527L129 132C112 40 105 36 23 28L17 0H279L285 28C199 34 194 40 211 132L239 284H284C320 284 334 275 351 236C374 182 394 140 420 93C459 23 495 -1 592 -8H600L610 18ZM480 485C480 424 449 372 403 342C374 323 338 316 293 316H245L291 562C296 589 301 601 311 608S337 618 358 618C432 618 480 575 480 485Z" id="g113-83"></path></g><g transform="matrix(.0091,0,0,-0.0091,8.086,3.132)"><path d="M810 0V30C751 35 744 40 744 106V296C744 396 694 451 614 451C583 451 558 438 537 425C512 409 485 391 454 368C434 420 390 451 342 451C309 451 285 439 260 424C228 405 206 387 185 372V453C141 434 90 421 43 413V386C102 378 105 373 105 309V106C105 41 96 35 29 30V0H243V30C194 35 185 41 185 106V335C216 360 256 389 297 389C357 389 384 348 384 275V106C384 41 374 35 312 30V0H530V30C475 35 465 41 465 104V294C465 313 464 324 463 336C502 367 539 389 576 389C637 389 663 346 663 274V109C663 41 653 35 593 30V0H810Z" id="g58-107"></path></g><g transform="matrix(.0091,0,0,-0.0091,15.593,3.132)"><path d="M327 325C324 350 312 408 304 433C283 442 256 451 213 451C120 451 59 391 59 320C59 243 125 210 188 181C237 158 266 136 266 93C266 52 231 24 195 24C134 24 93 81 74 148L42 143C42 106 51 37 59 23C78 8 125 -12 177 -12C257 -12 345 35 345 127C345 198 292 234 216 264C171 283 131 305 131 348C131 387 156 416 195 416C243 416 277 378 297 317L327 325Z" id="g58-113"></path></g></svg> and <svg height="11.927pt" id="M44" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 13.409 11.927" width="13.409pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M610 18C585 26 567 34 540 68C517 97 499 128 476 171C452 215 425 276 413 304C496 332 570 394 570 494C570 555 545 595 509 619S419 650 364 650H139L133 622C216 615 219 612 203 527L129 132C112 40 105 36 23 28L17 0H279L285 28C199 34 194 40 211 132L239 284H284C320 284 334 275 351 236C374 182 394 140 420 93C459 23 495 -1 592 -8H600L610 18ZM480 485C480 424 449 372 403 342C374 323 338 316 293 316H245L291 562C296 589 301 601 311 608S337 618 358 618C432 618 480 575 480 485Z" id="g113-83"></path></g><g transform="matrix(.0091,0,0,-0.0091,8.086,3.132)"><path d="M490 97L476 124C442 96 405 70 398 70C392 70 390 78 396 114C419 243 448 379 463 432L457 436C446 436 431 439 418 442C393 447 368 451 343 451C281 451 204 418 155 381C74 320 24 206 24 107C24 23 59 -12 88 -12C118 -12 155 5 191 34C236 70 290 122 328 177H330L312 84C296 0 311 -12 331 -12C355 -12 425 24 490 97ZM374 387C371 367 360 299 347 264C323 202 187 53 142 53C128 53 113 73 113 120C113 224 157 332 221 380C241 395 274 403 303 403C330 403 360 395 374 387Z" id="g50-98"></path></g></svg> of sputtered AlTiN coatings at various pulse-frequency in the range of 100–500 Hz determined via AFM measurements.</div>

Advances in Materials Science and Engineering

fig13

Figure 13

Figure 13: Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties 