Research Article
Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties
Figure 2
Time-dependent target voltages curves (a) and time-dependent current density per cm2 target surface (b) for different frequencies in the range of 100–500 Hz measured during HPPMS discharge at a constant pulse length of 50 μs and mean power of 4 kW at 0.6 Pa.
| (a) |
| (b) |