Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Figure 6

Calculated grain size by Debye-Scherrer formula and linear regression functions (a) of the fcc-AlTiN phases (black data points), the w-AlTiN phases (green data points), and the averaged grain size of both phases (red data points). (b) shows the average grain size of fcc-AlTiN and w-AlTiN as a function of the deposition rate at different pulse-frequencies in the range of 100–500 Hz.

(a)

(b)