Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties

Table 3

Identified 2θ-position from the peak intensity of fcc-AlTiN phases and w-AlTiN phases at various pulse frequencies in the range of 100–500 Hz.

Pulse frequency	Diffraction peak angle 2θ
	fcc-AlTiN (200)	w-AlTiN (112)
100 Hz	43.55°	50.60°
200 Hz	43.50°	50.55°
300 Hz	43.50°	50.60°
400 Hz	43.50°	50.60°
500 Hz	43.50°	50.60°