Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

<div>Friction coefficients as a function of number of rotations of Ti-DLC films.</div>

Advances in Materials Science and Engineering

Figure 8: Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties 