Research Article
Two Kinds of Hydrogen Monomers Manifested in Plasma-Exposed Silicon
Figure 3
Concentration profiles for a sample of NB = 1017 cm−3 annealed at 150°C for 30 min [11]. (a) Total concentration due to boron passivation and formation of H2A dimers by H0(1) + HB(2). (b) Individual components of the passivated boron.
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