Research Article

Two Kinds of Hydrogen Monomers Manifested in Plasma-Exposed Silicon

Figure 5

Concentration profiles in lightly doped n-Si. (a) Annealing at 150°C for 1 h [3]. (b) Annealing at 125°C for 1 h [17]. Each component of a profile, S and B, is described by Equation (11).
(a)
(b)