Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides

Figure 2

Key fabrication phases of laser ablation of multimode waveguides: (a) a base substrate of FR4, (b) formation of lower cladding by spin coating, (c) formation of the core layer, (d) laser ablation of the resulting sample from the core layer into the cladding layer, and (e) spin coating of the (optional) upper cladding.