Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_left">Membership function</td><td class="align_center">Mean prediction error (%)</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left">Triangular (trimf)</td><td class="align_center">4.194</td></tr><tr><td class="align_left">Generalized bell (<i>gbellmf</i>)</td><td class="align_center">1.991</td></tr><tr><td class="align_left">Gaussian (gaussmf)</td><td class="align_center">2.183</td></tr><tr><td class="align_left">Trapezoidal (trapmf)</td><td class="align_center">3.233</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Mean prediction error for different types of membership functions.</div>

Advances in Materials Science and Engineering

tab2

Table 2

Table 2: Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides 