Research Article
Experiment and Prediction of Ablation Depth in Excimer Laser Micromachining of Optical Polymer Waveguides
Table 3
Comparison of experimental and predicted mean depths and their relative errors.
| Experiment | Experimental mean depth (μm) | Predicted mean depth (μm) | % relative error (gbellmf) |
| 1 | 0.678 | 0.702 | 3.496 | 2 | 1.65 | 1.651 | 0.055 | 3 | 2.49 | 2.474 | 0.655 | 4 | 3.12 | 3.184 | 2.035 | 5 | 4.04 | 3.979 | 1.505 | 6 | 5.15 | 4.741 | 7.934 | 7 | 5.53 | 5.437 | 1.689 | 8 | 6.2 | 6.139 | 0.981 | 9 | 6.61 | 6.782 | 2.604 | 10 | 7.63 | 7.442 | 2.461 | 11 | 8.5 | 8.752 | 2.964 | 12 | 10.4 | 10.168 | 2.234 | 13 | 11.4 | 11.721 | 2.818 | 14 | 13.1 | 13.333 | 1.779 | 15 | 14.5 | 14.914 | 2.852 | 16 | 17 | 16.398 | 3.544 | 17 | 17.5 | 17.740 | 1.372 | 18 | 18.9 | 18.976 | 0.404 | 19 | 20.2 | 20.142 | 0.287 | 20 | 21 | 21.250 | 1.190 | 21 | 0.173 | 0.174 | 0.405 | 22 | 0.425 | 0.428 | 0.612 | 23 | 0.695 | 0.691 | 0.576 | 24 | 0.988 | 0.988 | 0.040 | 25 | 1.35 | 1.356 | 0.437 | 26 | 1.66 | 1.652 | 0.494 | 27 | 1.82 | 1.851 | 1.720 | 28 | 2.04 | 2.017 | 1.132 | 29 | 2.17 | 2.184 | 0.641 | 30 | 2.36 | 2.350 | 0.415 | 31 | 2.43 | 2.348 | 3.370 | 32 | 3.1 | 3.164 | 2.068 | 33 | 3.42 | 3.980 | 16.371 | 34 | 7.58 | 7.556 | 0.322 | 35 | 8.47 | 8.489 | 0.218 | 36 | 0.967 | 0.967 | 0.000 |
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Mean relative error = 1.991.
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