High Reliability and Fast-Speed Phase-Change Memory Based on Sb<sub>70</sub>Se<sub>30</sub>/SiO<sub>2</sub> Multilayer Thin Films

<div>Reversible reflectivity evolution of SbSe (1 nm) SiO (9 nm) thin film: (a) amorphization and (b) crystallization.</div>

Advances in Materials Science and Engineering

Figure 6: High Reliability and Fast-Speed Phase-Change Memory Based on Sb<sub>70</sub>Se<sub>30</sub>/SiO<sub>2</sub> Multilayer Thin Films 