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Advances in Materials Science and Engineering
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Advances in Materials Science and Engineering
/
2019
/
Article
/
Fig 18
/
Research Article
Design and Analysis of a Novel Piezo-Actuated
XYθ
z
Micropositioning Mechanism with Large Travel and Kinematic Decoupling
Figure 18
Tested output displacements in (a)
X
and
Y
directions and (b)
θ
z
direction.
(a)
(b)