Design and Analysis of a Novel Piezo-Actuated XYθ_z Micropositioning Mechanism with Large Travel and Kinematic Decoupling

Table 1

Fixed parameters of the mechanism.

Piezoelectric actuator (P885.91, Physik Instrumente, Germany)
Stiffness of the piezo stack	25 N/μm
Stiffness of the preloading mechanism	5.89 N/μm
Size of piezo stack	5 mm × 5 mm × 36 mm
Operating voltage	−20 V–120 V
Piezoelectric constant	0.316 μm/V
Material (Al 7075)
Elastic modulus	72 GPa
Shear modulus	27 GPa
Density	2750 kg/m^3
Yield strength	500 MPa
Right circular flexure hinge 1
Hinge thickness, t1	0.4 mm
Cutting radius, R1	1.2 mm
Right circular flexure hinge 2
Hinge thickness, t2	0.5 mm
Cutting radius, R2	1.0 mm
Right circular flexure hinge 3
Hinge thickness, t3	0.4 mm
Cutting radius, R3	0.5 mm